中文摘要：

通过氟基水热法合成出（001）取向的锐钛矿TiO2薄膜,讨论了薄膜的生长机理和忆阻性能.水热生长结果表明,预沉积无定形种子层增加了薄膜致密度,氟离子选择吸附促使TiO2薄膜的取向生长.薄膜的忆阻特性检测表明,（001）取向的TiO2薄膜忆阻单元具有良好的开关特性,稳定性良好.氟基水热法制备TiO2薄膜,设备和工艺简单,成本低,在忆阻器领域会有很好的应用潜力.

英文摘要：

Highly （001） -ofiemed TiO2 thin films were synthesized via F- based hydrothermal method, the growth mechanism and RRAM properties were discussed. Analysis showed that the pre - deposited amorphous seed layers increases the density, the adsorption of F - induced the oriemation of TiO2 in （001） direction. Performance tests demonstrated that the RRAM cell composed of the oriented TiO2 film showed nice resistance switching characteristics and good retention. The low production cost of the F - based hydrothermal method would make the oriented TiO2 film have potential application in the RRAM field.