中文摘要：

采用直流磁控反应溅射方法,通过调节氧分压在玻璃基底上制备了不同载流子浓度的掺Mo的ZnO（ZMO）透明导电薄膜.应用太赫兹电磁波时域光谱技术研究了ZMO导电膜的太赫兹电磁波透射性质及介电响应,得到了与频率相关的电导率、能量吸收和薄膜折射率,实验结果与经典Drude模型相符很好.ZMO导电膜的太赫兹电磁波脉冲透射性质表明,通过调节ZMO薄膜的载流子浓度,该导电膜可作为应用于衬底和光学器件等太赫兹电磁波频率范围的宽带抗反射涂层.

英文摘要：

With direct current reactive magnetron sputtering method,transparent conducting molybdenum-doped ZnO（ZMO） thin films with different carrier concentration on glass substrate were fabricated by monitoring oxygen partial pressure. The dielectric responses of the ZMO films are characterized with terahertz time-domain spectroscopy. Frequency dependent conductivity,power absorption,and refractive index are obtained,and the experimental results can be well reproduced with classic Drude model. Our results reveal that,by adjusting the carrier concentration of ZMO film,the conducting ZMO film can serve as broadband antireflection coatings for substrates and optics in terahertz frequency range.