研究了不同的选择性扩散方式对SE电池短路电流性能的影响。实验结果表明,采用预淀积PSG层的恒定表面杂质总量的扩散方式的SE电池可获得最佳的短路电流特性。通过对扩散工艺的研究发现.不论何种扩散方式,扩散时间的增加均会微弱降低电池短路电流特性;扩散温度的增加均会使电池的短路电流先增加后降低;在恒定表面浓度扩散过程中的氧化作用会导致电池性能的降低。
This paper studies SE solar cell performances affected by different diffuse methods. The experi- ments results show that the diffuse method with constant total dopant by pre-deposition PSG layer can obtain the best ISC performance. Increasing of diffuse time can slight decease the ISC by any diffuse methods. The ISC will enhance firstly, and then decrease with the increasing of the diffuse temperature. In the constant sur- face concentration diffusion process, the oxidation will lead to the battery performance reducing.