中文摘要：

首先简短地叙述了双端固支平行板静电执行器存在的倾斜问题,该问题会降低其可靠性并且减少其行程,从而限制它的应用范围。为了克服这个问题和提升该类执行器的性能,提出了一种新型的防倾斜MEMS平行板静电执行器结构,在实现防倾斜作用的同时获得了较大的行程。设计时对上极板的对称S型梁结构和分离的下电极结构进行了理论计算和仿真分析。基于商业表面微细加工工艺PolyMUMPs加工了样品并利用白光干涉仪进行了实验测试。该执行器可得到1.92μm的行程且不会发生倾斜,特别适合应用于微变形镜器件。

英文摘要：

The tilt problem of the fixed-fixed electrostatic parallel-plate actuator was briefly reviewed,which will reduce the actuator reliability,decrease the actuator storke and limit the application range of the actuator.A new tilt-proof MEMS electrostatic parallel-plate actuator was proposed to overcome the tilt problem and improve the performance of the actuator,which has the advantages of tilt-proof and large stroke.The theoretical calculation and simulation analysis of the symmetrical S-pattern springs of the upper electrode and separate lower electrode structure were carried out in the design process.The device sample was fabricated using a commercial surface microfabrication process PolyMUMPs,and the experimental measurement was performed by the white light interferometer.The actuator can achieve a stroke of 1.92μm without tilt,and is especially suitable for micro deformable mirror devices.