中文摘要：

ESD波形的随机性给计量校准和结论判断带来了一定问题,测量了某ESD模拟器的400条接触放电波形,使用统计方法进行研究,并且定义了衡量波形离散程度的新参量,分析了若干参量间的线性相关性,给出了计量中引入统计方法的建议：连续测量多条ESD波形的tr和峰值电流,统计tr和峰值电流的相对标准差且做适当限制,并规定一定比例的值落在限值区间内,就认为可以接受。

英文摘要：

Randomness of ESD waveform has brought some problems to the metrology and calibration especially in conclusion.400 contact ESD waveforms were measured and studied by using statistical methods.This paper defines the new indexes to describe dispersion of waveforms： the waveform error in group EWin,and error between groups EWb.This paper also analyzed the peak current,rise time tr,30 ns and 60 ns current,discharge amount and released energy in 60 ns,Linear correlation between some parameters is analyzed.Based on these conclusions,the proposal of using statistical method is put forward： measure tr and the peak current of multiple ESD waveform continuously,calculate relative standard deviation and make proper restriction.If a certain percentage of the values fall in the limits range,it is acceptable.