从薄板弹性理论出发,对可实现曲率变化的环形线负载驱动模型进行分析,给出了基于该模型的大镜厚比变曲率反射镜的形变方程.以较小的驱动力实现较大的中心形变为目标,利用MATLAB软件对不同反射镜厚度、驱动环半径下的反射镜形变情况进行模拟计算,结果表明,反射镜厚度范围在2~4 mm之间、驱动环半径数值在反射镜有效半径1/2处最佳.以此为依据,设计并研制了口径为100 mm、厚度为3 mm的铍青铜环形线负载驱动变曲率反射镜结构及原型样片,给出了变曲率反射镜整体结构前10阶的振动模态分析结果.完成装配后,反射镜原型样片的面形精度接近λ/30(λ为波长).对该结构进行极限曲率变化和面形精度保持的验证实验,通过对变曲率反射镜结构进行改进,环形线负载驱动能够实现超过30个波长(632.8 nm)的中心形变,且面形精度的变化与反射镜中心矢高的变化呈弱相关.
Based on the elasticity theory of thin plates,the basic analysis on annular line load model and deflection equations based on this model was given.Aiming to generate a large saggitus variation using a smaller force,mathematical analysis on different mirror thickness and actuate ring radius was done by using MATLAB,the corresponding optimal value is 2~4 mm and 1/2 mirror's clear radius.One QeB variable curvature mirror prototype,whose diameter and thickness is 100 mm and 3 mm respectively was designed,fabricated and the whole structure's first ten vibration mode analysis was given.The surface accuracy of the assembled prototype is nearly A/30.Finally,the capability in altering curvature and maintaining surface figure accuracy was tested experimentally.By improving the variable curvature mirror structure,the QeB variable curvature mirror could provide a saggitus more than 30 wavelengths(632.8 nm) and the degradation of surface figure accuracy is weakly correlated to the variation of radius of curvature.