文章主要介绍了几种X射线散射技术,包括X射线小角反射技术、X射线漫散射技术、掠入射X射线衍射和多晶薄膜的小角衍射技术。通过具体的事例说明这些X射线散射方法在薄膜研究中的应用。
Several X-ray diffraction/scattering techniques, including grazing incident X-ray reflectivity, transverse X-ray diffuse scattering, grazing incident X-ray diffraction and X-ray small-angle diffraction, for the characterization of films and muhilayers are described. Three examples are given to show the application of these methods.