中文摘要：

报道了一种半导体激光列阵侧面泵浦Nd：YAG四倍频266nm全固态紫外激光器，采用Z型腔结构，Ⅰ类临界相位匹配LBO和BBO晶体分别作为二倍频晶体和四倍频晶体。在调制频率为5kHz时，最终获得了2．1W的266nm紫外激光输出，单脉冲能量420μJ，绿光到紫外激光的转换率为13．13％，在相同的泵浦功率下利用V型腔结构仅获得305mw的266nm紫外激光输出。

英文摘要：

An all-solid-state laser diode（LD）-side pumped Nd：YAG ultraviolet（UV） laser at 266 nm is rcporlcd, whicl~ is based on fourth harmonic generation and adopts zigzag cavity structure. The type-Ⅰ critical phase matched LBO and BBO crystals are used as the second harmonic and fourth harmonic generation crystals, respectively, and 2.1 W UV laser of 266 nm with single pulse energy of 420 μJ is obtained at the pulse repetition rate of 5 kHz with the conversion efficiency of 13. 13% from green to ertraviolet light. With V shaped cavity configuration, only 305 mW 266 nm UV laser is obtained under the same condition.