中文摘要：

采用磁控溅射技术制备了MoS2,Ti/MoS2,Pb/MoS2和Pb-Ti/MoS2复合薄膜.通过AFM,SEM和XRD对薄膜的形貌和结构进行分析;利用纳米压痕仪,CSM摩擦试验机和Bainano高真空摩擦试验机分析薄膜的力学和摩擦学性能,并探讨了Pb、Ti掺杂对薄膜的结构,力学和摩擦学性质的影响.结果表明：Pb-Ti/MoS_2复合薄膜具有非常致密的结构,表面光滑平整,且具有较高的硬度;Pb、Ti共掺杂显著提高MoS2薄膜在RH75%高湿度环境下和真空环境下的摩擦学性能,在潮湿大气和真空环境下磨损率分别为未掺杂MoS2的13%和25%,且低于单一掺杂MoS2薄膜.PbTi/MoS2复合薄膜优异的摩擦学性能得益于Pb掺杂元素增加薄膜结构的致密度和Ti掺杂元素提高薄膜的抗氧化和力学性能.

英文摘要：

MoS2, Ti/MoS2, Pb/MoS2 and Pb-Ti/MoS2 composite coatings were prepared by magnetron sputtering system. The microstructure, mechanical and tribological properties of the coatings were investigated by various analytical techniques, and the influences of doped Pb and Ti on the structure and mechanic properties of the MoS2 coatings were discussed. Results show that the structure of the Pb-Ti/MoS2 composite coating was compact and dense, the surface of the coating was smooth, and the hardness of the Pb-Ti/MoS2 composite coating was higher than MoS2, Ti/MoS2 and Pb/MoS2 composite coatings. The tribological properties of the MoS2 coating under 75% RH and high vacuum was significant improved with the co-doped of Pb and Ti, and the wear rate of the coating under humidity and vacuum environment were about 13% and 25% of pure MoS2, and this was lower than the single doped MoS2 composite coatings. The excellent tribological properties of the Pb-Ti/MoS2 composite coating was ascribe to the compact structure, high anti-oxidation and mechanic properties.