中文摘要：

采用溶胶-凝胶技术在石英衬底上制备了Mg0.1Zn0.9O薄膜并研究了退火温度对薄膜结构、形貌和光学性能的影响.XRD结果表明,所有薄膜均呈六角钎锌矿结构,当退火温度高于700℃时,薄膜结晶质量变差;AFM结果显示,随退火温度升高,晶粒尺寸增大,当退火温度高于700℃时,薄膜表面出现团聚颗粒;UV-Vis结果表明,所有薄膜均在紫外区存在较强带边吸收,随退火温度升高吸收边红移;PL谱显示,所有薄膜均存在较强的紫外发射峰,随着退火温度升高,紫外发射峰逐渐红移且在700℃退火处理下紫外发射最强.

英文摘要：

Mg0.1Zn0.9O thin films have been prepared by Sol-Gel method and the effects of the annealing temperature on the structure,surface morphology and optical properties of the thin films are studied.The results of XRD indicate that the thin films have hexagonal wurtzite structure and the film crystalline quality deteriorates when the annealing temperatures are higher than 700℃;The results of atomic force microscopy show that grain sizes become larger when increasing annealing temperatures and the particles of reunification on surface of the thin film appear when the annealing temperatures are higher than 700℃;The UV-Visible spectrophotometer shows that the thin films have absorbtion edges in Ultraviolet and the redshift of absorbtion edges with annealing temperatures increasing;The results of photoluminescence show the thin films have relatively strong Ultraviolet emission peak and the redshift of Ultraviolet emission peak when annealing temperature increases,and the strongest Ultraviolet emission appear at the annealing temperature 700℃.