中文摘要：

为了改进表面的用机器制造的精确磨擦，用机器制造，有高效的 amicropositioning 细工品桌子被用作辅助在喂机制实现纳米水平放和动态赔偿。为了更好理解磨擦机器的特征，与微放调制了细工品桌子，磨擦系统的动态模型与形式的合成和 Lagrange 被建立“ s 方程方法。磨擦系统被划分成五个分系统。为每个分系统，概括运动学并且势能被获得。因此，磨擦系统的动态模型在形式的域被给。磨擦过程的起浪基于车轮和细工品颤动被完成。有微分追踪者的一个非线性的比例的不可分的衍生物(PID ) 控制器被开发认识到动态控制。模拟结果证明细工品的用机器制造的精确性能被利用微放细工品桌子实现动态赔偿有效地改进。试验性的测试被执行验证建议方法，并且细工品的起浪能从 0.46 下午被归结为 0.10 亩 m。

英文摘要：

To improve the machining precision of a surface grinding machine, a micropositioning workpiece table with high performance was used as auxiliary infeed mechanism to implement nanometer level positioning and dynamic compensation. To better understand the characteristics of the grinding machine modulated with micropositioning workpiece table, the dynamic model of the grinding system was established with modal synthesis and Lagrange＇s equation methods. The grinding system was divided into five subsystems. For each subsystem, the generalized kinematic and potential energies were obtained. Accordingly the dynamic model of the grinding system was given in the modal domain. The waviness of the grinding process was achieved based on the wheel and workpiece vibration. A nonlinear proportional integral derivative （PID） controller with differential trackers was developed to realize dynamic control. The simulation results show that the machining accuracy of the workpiece can be effectively improved by utilizing the micropositioning workpiece table to implement dynamic compensation. An experimental test was carried out to verify the proposed method, and the waviness of the workpiece can be reduced from 0.46 μm to 0.10 μm.