中文摘要：

表征了新合成的热光聚合物bisphenol A-aldehyde resin （BPA-resin）的独特性质.并且利用光刻和反应离子刻蚀技术（RIE）制备成功BPA-resin 聚合物的单模条波导.实验结果表明,对于TE和TM偏振,该聚合物波导在1.31 μm和1.55 μm波长下分别有低达0.43 dB/cm和0.51 dB/cm的传播损耗.在上述波长下,波导的低偏振相关损耗 （PDL）小于0.1 dB/cm.因此,是制备可调热光器件的良好导波模快.

英文摘要：

The unique characteristics of newly synthesized thermo-optical polymer, bisphenol A-aldehyde resin （BPA-resin） has been presented. And the single-mode channel waveguides based on BPA-resin polymer were fabricated using photolithography and reactive ion etching （RIE） technique. The experimental results exhibit that the polymer waveguide has a low propagation loss of 0.43 dB/cm and 0.51 dB/cm at a wavelength of 1.31 μm and 1.55 μm, respectively, for both TE and TM polarizations. The low polarization dependence loss （PDL） of the waveguide was less than 0.1 dB/cm at above wavelengths, which can be applied in thermal-optical tuned devices.