中文摘要：

为比较使用不同气体工质的电子回旋共振（ECR）中和器的性能,在真空环境下,用一个电子收集板模拟离子的作用,将电子电流从ECR中和器中引出,实验研究了以氩气和氪气为工质时,ECR中和器引出电子电流的大小以及中和器的性能。实验结果表明：以氩气为工质,ECR中和器在体积流量0.8 m L/min时,88.6 V电压可引出103.8 m A的电子电流,工质利用效率和电子损耗分别为1.278 9 W/A和194.573 W/A;以氪气为工质,ECR中和器在体积流量0.6 m L/min时,75 V电压可引出108 m A电子电流,工质利用效率和电子产生损耗分别为1.783 2W/A和176.7 W/A。以氪气为工质的中和器性能明显优于氩气,但2种工质都可以满足ECR离子源中和离子束流的需要。

英文摘要：

To compare the performances of electron cyclotron resonance （ECR） neutralizer using different gas propellants, we used an electron collection plate to simulate ion beam effect and extract electron current from the neutralizer, and measured the electron current and relevant performance parameters of neutralizer using argon and krypton propellants, respectively. The experimental results show that the neutralizer with krypton performs better than that with argon： using Ar propellant of 0.8 L/rain and bias voltage of 88.6 V, the neutralizer＇s electron beam current, gas utilization factor and electron production cost are 103.8 mA, 1.278 9 and 194.573 W/A, respectively, while using Ke propellant of 0.6 mL/min and bias voltage of 75 V, the later three parameters are 108 mA, 1.783 2 and 176.7 W/A, respectively. Though Ke is better than Ar as the propellant for ECR neutralizers, both gases meet the demands of neutralizing ion beam for ECR plasma sources.