综述了近几年氮氧化硅复合材料、氮氧化硅薄膜材料和介孔氮氧化硅材料的研究与发展现状。着重介绍了氮氧化硅薄膜材料的发光特性和折射率可调特性,及其不同的制备方法。同时介绍了介孔氮氧化硅材料和Si_3N_4/Si_2N_2O、SiC/Si_2N_2O及BN/SiNOf三种应用较多的氮氧化硅复合材料的研究现状。并对氮氧化硅材料的研究与应用进行了展望。
Recent research and development of silicon oxynitride composites,silicon oxynitride film materials and mesoporous silicon oxynitride materials are reviewed in this paper.It focuses on the light-emitting properties and adjustable refractive index of silicon oxynitride film materials,as well as different preparation methods.This article also introduces the research status of mesoporous silicon oxynitride materials and three common silicon oxynitride composites(Si_3N_4/Si_2N_2O,SiC/Si_2N_2O and BN/SiNOf).Moreover,the research and application of silicon oxynitride materials are anticipated.