中文摘要：

激光全息法制作二、三维光子晶体相比于传统半导体微加工及精密机械加工技术具有很多优势,比如通过一次光辐射就可以制作出大体积、均匀的周期性结构,且能更自由、更容易地控制光子晶体结构.提出一种多光束干涉模型,通过设计模型中光束的各项参数,计算分析出二、三维光子晶体的结构.基于平面波展开法,理论计算了fcc结构光子晶体的完全禁带随填充率和介电常数比变化的情况.以上计算结果为后期实验中采用激光全息法制作二、三维光子晶体结构提供了良好的指导方向和理论依据.曲线轮廓界面的近似处理方法,提出当曲线轮廓各点的曲率半径都比较大时,可以把曲线分割成多段直线处理.最后分析了影响纵向分辨率的因素.结果表明,输入脉冲的脉宽越大则纵向分辨率越低,一般情况下纵向分辨率可达到亚毫米量级.

英文摘要：

Compared with the semiconductor and micromachining fabrication technology, the holographic lithography method offers a number of advantages, including its ability to create large volume of periodic structures through one irradiation process, the uniformity of period, and more degrees of freedom to control the structures. In this study, a multi-beam interference model is presented for predicting two- and three-dimensional photonic crystal structures through designing the beam intensities, polarization directions and phase delays. Based on plane wave expansion method, complete forbidden bands of three-dimensional photonic crystals with fcc structure are also studied. The calculated results provide a useful guide for choosing proper optical parameters to fabricate two- and three-dimensional photonic crystal structures.