中文摘要：

为了实现对工件表面质量进行预测和控制，对砂轮表面的三维形貌测量、表征和评价就显得尤为重要．设计了一款砂轮检测用白光垂直扫描干涉仪三维运动机台，主要分为XY向位移平台部分、砂轮旋转定位部分、桥式立往部分以及含有柔性铰链的z向微位移系统部分，通过有限元静动力学分析优化机台结构，使其满足使用要求．实现XY向位移平台单脉冲步长0．3125μm，Z向精级机构行程15μm，精度0．03μm．

英文摘要：

In order to predict and control the quality of the mechanical parts, the measurement, characterization and evaluation of the 3D profile of grinding wheels are critically important. This paper designs a white-light vertical scanning interferometer 3D motion machine for grinding wheels detection. It includes an X-Y direction displacement platform, a rotary location platform, bridge-shaped columns and a Z-direction micro-displacement system parts with flexure hinges. The platform structures are optimized by finite element static and dynamic analysis to satisfy the requirements. The single pulse length of X-Y direction displacement platform is 0. 3125 μm. Z direction has a range of 15μm with the accuracy of 0.03μm.