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Low-energy electron-beam lithography of hydrogen silsesquioxane
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相关项目:红外波段左手材料的加工及性质研究
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红外波段左手材料的加工及性质研究
期刊论文 10
会议论文 3
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Modulated terahertz responses of split ring resonators by nanometer thick liquid layers
Comparative study of e-beam resist processes at different development temperature
Electron beam lithography of HSQ/PMMA bilayer resists for negative tone lift-off process
Fabrication of Terahertz Metamaterials Using S1813/LOR Stack by Lift-off
Microfabrication and properties of the meta-materials
微纳米加工技术在纳米物理与器件研究中的应用