中文摘要：

<正>Low-k interconnection is one of the key concepts in the development of high-speed ultra-large-scale integrated(ULSI) circuits.To determine the Young’s modulus of ultra thin,low hardness and fragile low-k porous films more accurately,a wideband differential confocal configured laser detected and laser-generated surface acoustic wave(DCC/LD LSAW) detection system is developed.Based on the light deflection sensitivity detection principle, with a novel differential confocal configuration,this DCC/LD LSAW system extends the traditional laser generated surface acoustic wave(LSAW) detection system’s working frequency band,making the detected SAW signals less affected by the hard substrate and providing more information about the thin porous low-k film under test.Thus it has the ability to obtain more accurate measurement results.Its detecting principle is explained and a sample of porous silica film on Si(100) is tested.A procedure of fitting an experimental SAW dispersion curve with theoretical dispersion curves was carried out in the high frequency band newly achieved by the DCC/LD LSAW system.A comparison of the measurement results of the DCC/LD LSAW with those from the traditional LSAW shows that this newly developed DCC/LD LSAW can dramatically improve the Young’s modulus measuring accuracy of such porous low-k films.

英文摘要：

Low-k interconnection is one of the key concepts in the development of high-speed ultra-large-scale integrated（ULSI） circuits.To determine the Young＇s modulus of ultra thin,low hardness and fragile low-k porous films more accurately,a wideband differential confocal configured laser detected and laser-generated surface acoustic wave（DCC/LD LSAW） detection system is developed.Based on the light deflection sensitivity detection principle, with a novel differential confocal configuration,this DCC/LD LSAW system extends the traditional laser generated surface acoustic wave（LSAW） detection system＇s working frequency band,making the detected SAW signals less affected by the hard substrate and providing more information about the thin porous low-k film under test.Thus it has the ability to obtain more accurate measurement results.Its detecting principle is explained and a sample of porous silica film on Si（100） is tested.A procedure of fitting an experimental SAW dispersion curve with theoretical dispersion curves was carried out in the high frequency band newly achieved by the DCC/LD LSAW system.A comparison of the measurement results of the DCC/LD LSAW with those from the traditional LSAW shows that this newly developed DCC/LD LSAW can dramatically improve the Young＇s modulus measuring accuracy of such porous low-k films.