中文摘要：

为了解决实际测量中单一测量方法存在的局限性,结合白光干涉测量技术与共聚焦测量技术,通过紧凑型部分共光路结构原则,设计并搭建了一套超精密表面形貌光学测量系统,实现微纳米几何形貌的三维重构与测量。基于C#语言与DirectX11开发组件,开发了上位机执行软件,实现了两种光学测量模式下硬件的协调控制及纳米标准样板表面形貌的三维重构。对台阶高度标定值为（98.8±0.6）nm的台阶标准样板进行测量,实验表明：用白光干涉测量模式和共聚焦测量模式分别实现了对台阶样板的大范围快速测量和小范围精密测量,10次测量的平均值分别为100.5和99.8 nm,标准差均小于2 nm,说明该系统能较好地满足微纳器件超精密表面形貌测量的要求。

英文摘要：

In order to overcome the limitation of a single measurement method in practical measurement,an optical measurement system for ultra-precision measurement of surface morphology was designed and implemented by combining white light interferometry measurement technique with confocal measurement technique and based on the principle of a compact structure and a part sharing of common optical pathway to achieve three-dimensional reconstruction and measurement of the micro/nano geometry morphology.An executable PC software was developed based on C#language and DirectX11 component to achieve the coordinated control of hardware and three-dimensional reconstruction on nano-scale standard template surface morphology under the two optical measurement modes.The calibrated standard step with the step height of（98.8±0.6）nm was measured.The experiments show that a wide range is measured rapidly by white light interference measuring mode and a small range is measured more precisely by confocal measurement mode.Their average values of ten times measurement are 100.5 nm and 99.8 nm,respectively,and both of the standard deviations are less than2 nm,showing that the system can perfectly meet the measurement requirements of ultra-precision surface morphology measurements of micro/nano devices.