中文摘要：

用多弧离子镀膜技术结合热扩散成功制备了高硅钢材料。研究了在不同扩散温度下合金的结构、形貌以及硅扩散深度。X射线衍射（XRD）测试表明,在经过高温热处理后样品表层均为α-Fe体心立方结构。硅扩散依赖于表层Fe3Si的结构的形成,场发射扫描电镜结合X射线能谱（FE-SEM,EDS）检测显示：在经过1200℃真空热处理后样品断面硅质量分数从4.6%至5.1%不等,而显微硬度HV测试值为2800 MPa,进一步印证了能谱测试的准确性。

英文摘要：

High silicon steel has been prepared by physical vapor deposition, i. e. multi-arc ion coating and diffusion. Subsequent annealing in vacuum at 1180 and 1200 ℃ result in penetration of silicon into the substrate. X-ray diffraction（XRD） reveals that the surface layers of all samples remain α-Fe bcc structure after high temperature-diffusion treatment. Once Fe3Si is formed in the surface layer, a further heat treatment will make the composition of the sample homogenizations. The silicon concentration distribution along the cross-section is 4.6 wt%~5.1 wt% after annealing at 1200 ℃ for 1 h which was tested by field emission scanning election microscopy（FE-SEM） equipped with energy dispersive spectroscope（EDS）, and was further confirmed by micro Vickers-hardness, where the average cross-section micro Vickers-hardness is 2800 MPa.