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Fluorinated nanoporous SiO2 films with ultra-low dielectric constant
ISSN号:0022-3093
期刊名称:Journal of Non-Crystalline Solids
时间:0
页码:3867-3870
语言:英文
相关项目:TM-SiGeC体系的微结构、磁性与输运性质
作者:
C.M. Zhen|J.J. Zhang|Y.J. Zhang|C.X. Liu|C.F. Pan|D.L. Hou|
同期刊论文项目
TM-SiGeC体系的微结构、磁性与输运性质
期刊论文 41
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