中文摘要：

为了开发结构简单，抗干扰能力强的纳米测量精度光栅传感器，对基于二次莫尔条纹信号的纳米测量精度光栅传感器的测量原理进行了理论分析，通过仿真计算，其测量分辨力可达到5．40〉（10^10-10m，测量精度可达到纳米级。此外，对指示光栅和标尺光栅不平行时对二次莫尔条纹信号质量的影响进行了理论分析和仿真计算。

英文摘要：

In order to develop metrological grating with nano measurement precision,which has simple structure, high performance on anti-interfere,the measurement principle of nano measurement precision grating is analyzed based on two times＇ Moire fringe,its resolution can achieve 5.40 〉 10^-10m,and the measurement precision can achieve nanometer through simulated calculation. Furthermore,it discusses the effects of two times＇Moire fringe when the indicator grating and scales grating is not parallel.