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Diagnosis of the argon plasma in a PECVD coating machine
  • 期刊名称：Plasma Science and Technology
  • 时间：0
  • 页码：727-730
  • 语言：英文
  • 分类：R197.39[医药卫生—卫生事业管理;医药卫生—公共卫生与预防医学]
  • 作者机构：[1]School of Mechanical Engineering & Automation, Northeastern University, Shenyang 110004, China, [2]College of Information Science and Engineering, Northeastern University, Shenyang 110004, China
  • 相关基金：supported by the Enterprise Postdoctoral Research Fund of Liaoning Province （BSH： 2004921032）, National Natural Science Foundation of China （No. 60774093）.
  • 相关项目：自适应过程故障诊断的盲源信息增值及决策方法研究
作者： Feng Jian|Wang Qin|Ba Dechun|
关键词： PECVD, 涂层, 等离子体诊断学, 兰米尔等离子测量仪, PECVD, coating machine, plasma diagnostics, Langmuir probe
中文摘要：

E-mail address of WANG Qing： qingwang@mail.neu.edu.cn

同期刊论文项目
自适应过程故障诊断的盲源信息增值及决策方法研究
期刊论文 56 会议论文 7 获奖 10 专利 9
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