中文摘要：

微电子机械系统（MEMS）半球谐振陀螺是MEMS微陀螺领域的研究热点,能工作在角速度积分模式下,具有体积小、质量轻、功耗低、成本低、对称性高、Q值高,以及精度高等优点。文章给出了一种微型半球谐振陀螺的结构,研究了其工作原理以及检测方法,设计了一种数字式MEMS半球谐振陀螺仪的角速度积分工作模式方案及其FPGA实现方法,以完成目前MEMS半球谐振陀螺的角速度积分模式的控制与检测工作。

英文摘要：

The MEMS（Micro-Electro-Mechanical System）HRG（Hemispherical Resonator Gyroscope）as a kind of MEMS gyroscopes is a research hotspot,which can work in the RIG（Rate-Integrating-Gyroscope）mode.The emergence of MEMS gyroscopes has produced sensors with smaller size,lower cost,lighter weight,less consuming power,high symmetry,high Qfactor and high accuracy than previous solutions.In this paper,the structure of a MEMS HRG was proposed and the working principles and detection methods were studied.In order to accomplish the work of control and detection of MEMS RIG mode for MEMS HRG,a digital scheme for the MEMS RIG with hemispherical resonator was developed and a FPGA platform was designed.