中文摘要：

用低能氩离子束（Ar^＋）处理了多孔铝阳极氧化膜（AAO）表面．扫描电子显微镜和原子力显微镜结果表明，Ar^＋束刻蚀不仅可以有效地去除AAO反面阻挡层，还可使AAO表面产生多种特殊的形貌，如采用倾角入射可使其表面产生波纹，倾角入射同时旋转样品台，可实现表面抛光．并结合Bradley和Harper提出的无定形材料表面波纹的形成和演化理论解释了AAO表面波纹的特征．

英文摘要：

Porous anodic aluminum oxide （AAO） membranes were sputtered by 500eV argon ion （Ar^＋） beam. Scanning electron mieroseopy and atomie force mieroseopy images show that not only the barrier layer of AAO can be easily removed by Ar^＋ beam sputtering, but also several categories of surface morphologies were got by changing the incidence parameters. For instance, offnormal incidenee bombardment results in ripple formation on the surfaee of AAO and off-normal incidence during smple stage rotation leads to AAO surfaee smoothing. Theory of ripple formation and evolution on amorphous substrate under ion beam irradiation developed by Bradley and Harper is used to interpret the eharaeteristics of ripples on AAO surface.