中文摘要：

采用物理气相沉积（PVD）与阳极氧化与电沉积相结合的复合技术在Si基表面制备了羟基磷灰石（HA）／Al2O3复合生物涂层。采用SEM研究了阳极氧化Al2O3和HA／Al2O3复合生物涂层的形貌，并采用EDS与XRD研究了HA／Al2O3复合生物涂层的组成和物相。结果表明：扩孔处理后阳极氧化的Al2O3孔径约为1．5～3．0μm，电沉积HA的n（Ca）／n（P）约为1．61，最终获得了以HA为外层、HA／Al2O3为中间过渡层、Si为基底的复合材料。其中，HA不仅沉积于阳极氧化Al2O3的孔洞中，且外延生长并覆盖在阳极氧化Al2O3表面，从而在HA外层与HA／Al2O3中间过渡层之间形成了一种T形分布的结构特征，该结构特征将有助于增强HA外层与中间过渡层的界面结合强度。

英文摘要：

The bioactive coating of hydroxyapatite/Al2O3 on Si substrate was fabricated by a hybrid technique of physical vapor deposition （PVD）, anodization and electro-deposition. Scanning electron microscopy （SEM）, energy dispersive spectroscopy （EDS） and X-ray diffractometry （XRD） were employed to investigate the morphologies, composition and phases of anodic Al2O3 and HA/Al2O3 composite coating. The results show that the porous anodic Al2O3（the intermediate layer）with pores of 1.5 - 3.0 μm is obtained after the anodization and subsequent pore-widen process. The hydroxyapatite coating （top layer）is electrodeposited into the holes of anodic Al2O3 and onto the surface of anodic Al2O3. The mole ratio of Ca and P of hydroxyapatite coating is 1.61. The distribution of HA in HA/ Al2O3-Si composite exhibits a feature of T shape structure, which will be beneficial to improve the bonding strength between the HA top layer and the HA/Al2O3 intermediate layer.