中文摘要：

对射频放电产生单重态氧进行了实验研究,在不同掺杂物种、不同电极间距、不同稀释配比的情况下,研究了单重态氧相对产率的变化规律,分析了单位氧流量注入能量对单重态氧产率和电效率的影响。实验表明,NO和Hg蒸气的加入,使放电产生单重态氧的相对产率都有显著的提高。随着电极间距的缩小,可以实现高气压工作,放电总压可以达到22.6 kPa,氧气分压超过了4.0 kPa,产率方面也有大幅度提高。单位氧流量注入能量在150~400 J/mmol时,单重态氧产率比较高;电效率较高的区域对应的单位氧流量注入能量在150 J/mmol左右。

英文摘要：

The production of singlet delta oxygen by radio frequency（RF） discharge is studied experimentally.The trends of the relative yields of singlet delta oxygen as functions of different doped gases,different electrode gaps and He/O2 ratios are obtained.The dependences of singlet delta oxygen yields and electric efficiency on the specific input energy are analyzed.The experimental results show that the relative yield of singlet delta oxygen increases obviously by adding nitric oxide or gaseous mercury.Homogeneous glow discharges at high pressure can be achieved with the total pressure of 22.6 kPa and the oxygen partial pressure up to 4.0 kPa by reducing the electrode gap.The optimum relative yield of singlet delta oxygen is obtained with the specific input energy of 150~400 J/mmol oxygen,and the optimum electric efficiency is obtained with the specific input energy of 150 J/mmol oxygen.