中文摘要：

综述了多晶硅生产过程中尾气的分离方法,经过精馏分离后副产物中SiHCl3、HCl和H2可循环利用。并介绍了SiCl4和SiH2Cl2的处理方法,通过分析前人所做的结果发现：副产物SiCl4可用锌还原法进行处理,这样就形成西门子法与锌还原法相结合生产多晶硅的合理方法,既能降低成本,又能回收利用SiCl4,且能完全闭路循环;SiH2Cl2可用来进一步制备多晶硅。

英文摘要：

The exhaust treatment method in polycrystalline silicon production is addressed in this paper.SiHCl3,HCl and H2 can be recycled after extractive distillation of the by-products.Furthermore,the treatment methods about SiCl4 and SiH2Cl2 are elaborated.Results showed the by-product SiCl4 can be treated by zinc reduction process.Then an attractive process combining the Siemens process with zinc reduction process to produce polycrystalline silicon is obtained.The process has a lot of advantages.The production cost of polycrystalline silicon can be reduced,the by-product SiCl4 can be recycled and the process is closed-circuit circulation.The by-product SiH2Cl2 can be used to produce polycrystalline silicon.