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Ni-Al diffusion barrier layer for integrating ferroelectric capacitors on Si
  • 期刊名称：Appl. Phys. Lett.
  • 时间：0
  • 页码：203-209
  • 语言：中文
  • 相关项目：纳米金属材料
作者： F. Li|L. Ma|C. S. Cheng|X. Y. Zhang|Y. Wang|D. Q. Wu|C. R. Li|Q. X. Zhao|X. H. Li|B. T. Liu|Z. Yan|
同期刊论文项目
纳米金属材料
期刊论文 43 会议论文 7 专利 6
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