原子力显微镜是一种分辨率极高且能三维成像的表面形貌分析仪器。文章介绍了原子力显微镜(AFM)的工作原理,总结了原子力显微镜在金属材料制备工艺技术、金属功能材料研究、金属材料微观组织与性能关系研究等方面的应用情况。
The principles of atomic force microscopy (AFM) are briefed. Some recent applications of AFM in metallic material research like processing technology, developing advanced materials and improving the properties have been commented. As a useful instrument, the main advantage is that AFM can provide three dimensions of topographic image with a high resolution.