中文摘要：

激光直写技术具有加工效率高、加工速度快、环境污染小等优点,近年来在国内的发展非常迅速。采用计算机操纵控制的激光直写技术,可以构建复杂的微纳图案,满足微细加工要求。建立了一套基于计算机控制的激光直写系统,它由光机电和控制软件部分组成。在建立的系统上,以玻璃为基底进行了金光栅的制作并对其进行了形貌测量。测量结果表明,采用该激光直写系统制作的金光栅具有较高的重复精度。

英文摘要：

Because of high processing efficiency,processing speed,less environmental pollution,etc.,recently,laser direct writing technology is growing very rapidly in China.In this paper a laser direct writing system is built based on computer control,it includes optomechatronics and control software.The system is used for the production of gold grating on the glass substrate,and its profile is measured.