中文摘要：

高功率激光电离垂直飞行时间质谱（LI—O—TOFMS）应用于薄层的深度分析是目前一项相对新颖的分析技术，不仅可以分析薄层的厚度，而且可以同时确定其中的元素组成及其随深度的分布情况。激光参数：波长532nm，脉宽4．5ns，功率密度9x10^9W/cm^2。该项分析技术可以分析单镀层和多镀层的薄层样品。薄层的分辨厚度范围达到微米水平。相比其它薄层分析技术，LI-O-TOFMS是一项多功能的深度分析工具。

英文摘要：

As a relatively new technique, high irradiance laser （4.5 ns, 532 nm, 9×109 W/cm2） ionization orthogonal time-of-flight mass spectrometry （LI-O-TOFMS） has been applied for depth profile analysis of various coated samples as well as element determination with respect to depth in solid samples. This technique is capable of performing depth profiling of coated layer with a thicknesses from sub-micrometer to tens micrometer scale; and can examine samples with monolayer and multilayer coated. Compared with other analytical techniques, LI-O-TOFMS is a versatile analytical tool in rapid depth profiling of coated samples.