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中文摘要：
振动主动控制是消除干扰和提高机械加工精度的主要手段之一。振动主动控制的前提是对频率在5kHz以上微振动信号进行准确测量。针对现有光纤光栅传感器在测量高频微振动信号上存在的频率低、结构复杂、无法分布式测量等不足，采用频率调制连续波（FMCW）技术结合光强度调制，设计了一种全光纤分布式微振传感器，并通过压电换能器（PZT）微振测量实验和仿真对传感器的性能进行验证，能够分布式测量频率最高为60kHz的微振动信号。
英文摘要：
Vibration active control is one kind of main methods to eliminate interference and improve machining accuracy. The premise of vibration active control is the precise measurement of micro-vibration signal whose frequency is upper 5 kHz. A full-fiber micro-vibration distributed sensor is designed using frequency modulated consecutive wave （FMCW） and light intensity modulation technology, aiming at the shortage of existing grating sensor used for micro-vibration signal measurement, such as low frequency, complex structure and individual measurement etc. Through piezoelectric transducer （PZT） micro-vibration measuring experiment and simulation, it can prove that top frequency of 60 kHz for distributed measurement is achieved.
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