中文摘要：

随着集成电路技术进入深亚微米技术节点，提高成品率成为研究热点问题。文中提出了一种基于图像处理的版图优化方法来提高成品率。该方法首先确定两个待优化线网和其可移动空间，再找出两个待优化线网的最佳移动位置，将两个待优化线网移动后所减小短路关键面积最大的线网，作为本次优化的线网，实现对版图的优化。文中提出的优化方法不但考虑了缺陷的真实轮廓特征和粒径分布特征，而且不受版图线网的形状的制约，为版图优化提供了更准确的依据。

英文摘要：

In this paper, a method for optimizing layout based on image processing is proposed to improve the yield. The two waited-optimization nets and their movable space are first determined. Then the optimal location of removing waited-optimization net in movable space is separately found out. The waited-optimization net is used as the removing net to optimize layout this time that the maximum critical area is reduced through removing the waited-opti- mization net. Not only is the true contour and particle size distribution of defects considered in the method, it is also not constrained by the shape of nets on the layout, which provides a more accurate basis for optimizing layout.