以硅粉、锗粉为原料,用高能球磨法制备硅锗合金。采用X-射线衍射(XRD)、扫描电镜(SEM)以及能谱仪(EDS)研究了粉体随球磨时间的物相转变过程。结果表明,硅粉与锗粉经球磨时间为80h后合成出分散程度较高的SiGe二元合金。
The alloy of silicon and germanium are prepared by the method of high--energy ball--milling. The transformation of phase composition of single phase SiGe powders are investigated by the X--ray diffraction (XRD), scanning electron microscopy (SEM) and energy disperse spectroscopy (EDS). It is found that the high dispersed alloy of SiGe are synthesized by 80h high--energy ball--milling method for the composition of silicon and germanium.