MEMS-based ZnO Piezoelectric Tactile Sensor for Minimally Invasive Surgery
- ISSN号:1002-185X
- 期刊名称:《稀有金属材料与工程》
- 时间:0
- 分类:TG[金属学及工艺]
- 作者机构:[1]MST Research Center, Dalian University of Technology, Dalian 116023, China, [2]Department of Electronic Engineering, Dalian University of Technology, Dalian 116023, China
- 相关基金:Acknowledgements: The project is supported by National Natural Science Foundation of China(No.90207003)
中文摘要:
E-mail: minrui_wang@ 163.com (corresponding author)