采用sol-gel法制备ZnO及CeO2掺杂量分别为6%、7%和8%(质量分数)的ZnO粉体。通过XRD、SEM对材料的表面形貌和结构进行表征。研究了掺杂量对粉体制备的影响。采用静态配气法对该粉体制成的气敏元件进行测试,结果表明,在工作温度仅为85℃的条件下,7%(质量分数)CeO2-ZnO气敏传感器对饱和丙酮蒸汽的灵敏度最高达9634,响应时间为3s,恢复时间为2s;在较低浓度2.0×10-4时灵敏度也可达30左右。并对丙酮气敏传感器的气敏机理进行了进一步探讨。
Undoped ZnO, and 6% ,7 %,8wt% CeO2-ZnO thick film were prepared by sol-gel method. Their mor- phology and structure were characterized by XRD and SEM. The concentration of dopant was analysized for the preparation effect of CeO2-ZnO. The gas sensors made by the nanopowder were tested by the method of static volumetric. The result indicated that the maximum sensitivity of CeO2-ZnO gas sensor to the saturated acetone vapors reached 9643, and the response and recovery times were 3 and 2s separately when the operation tempera- ture was 85℃. The sensitivity reached 30 in the low concentration (2.0×10^-4 ). The acetone-sensing mecha- nism of the thick film has been further studied.