使用磁控溅射方法制备了一系列Tb-Co2FeAl磁性薄膜,研究了两种不同溅射功率以及不同的薄膜厚度对样品的磁性的影响。采用交变梯度磁强计(AGM)对样品磁性能进行表征。结果显示,当Tb靶和Co2FeAl靶的溅射功率分别为5和15 W时,同时表现出平面内各向异性及弱垂直各向异性;而当功率分别为10和30 W时则表现出强垂直磁各向异性,垂直矫顽力Hc=3.3×104A.m-1,且垂直矫顽力的值随着薄膜厚度降低也逐渐减小,当厚度减小到10 nm时,Hc=1×104A.m-1。
A series of Si(100)/Ta(2 nm)/Tb-Co2FeAl(x)/Ta(2 nm) samples with different sputtering power and thicknesses were prepared by magnetron sputtering,so as to study the effects of different sputtering power and thicknesses on magnetic properties measured by AGM.Both in-plane anisotropy and week perpendicular anisotropy were shown under the sputtering power of 5 and 15 W for the Tb and Co2FeAl alloy targets,respectively,while good perpendicular anisotropy was shown under the sputtering power of 10 and 30 W,and t...