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中文摘要：
对国际上普遍采用的两种EUV光源：放电等离子体源（DPP）和激光等离子体源（LPP）进行了多方面比较。给出了两种等离子体源各自优点及难以克服的困难。基于目前的测量结果，指出了ECR等离子体有潜力成为一种新型的极紫外辐射源。
英文摘要：
The general EUV sources, discharge produced plasma （DPP） and laser produced plasma （LPP）, were compared in many respects. The virtues and challenges of each, some of which seem hard to overcome for now, were given. Based on the measurements, electron cyclotron resonance （ECR） plasma was introduced as a novel EUV source.
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