中文摘要：

采用卢瑟福背散射（Rutherford backscattering spectroscopy，RBS）方法对强脉冲离子束辐照Ti/Al、Al/Ti和Ni／Ti三组薄膜／衬底体系所形成的混合层进行了研究。在Ni／Ti组合中形成了厚度比离子射程大得多的、混合度较高的梯度混合层。发现熔融态混合的程度不仅取决于两材料在熔融态的表面张力的差别，而且取决于它们熔点的差异。这两个参量较接近的混合程度较好。

英文摘要：

The mixing effect of three different film/substrate systems, Ti/Al, Al/Ti and Ni/Ti, which were irradiated by intense pulsed ion beam, was studied with Rutherford backscattering spectroscopy （RBS）. It was found that a quite well mixed layer with gradient components was formed in Ni/Ti combination. The thickness of the mixing layer is far beyond the ion range. They were mixed probably in molten state. It was also found that the mixing degree strongly related to the difference of the melting points of film/substrate couple, as well as the difference of the surface tensions.