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CMP Behavior of α-Alumina-g-Polyvinylpyrrolidone Composite Abrasive on Hard Disk Substrate.
  • ISSN号：1022-6680
  • 期刊名称：Advanced Materials Research
  • 时间：0
  • 页码：2135-2139
  • 相关项目：纳米多孔复合磨粒设计及其化学机械抛光机理研究
作者： Hong Lei| Naijing Bu|
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纳米多孔复合磨粒设计及其化学机械抛光机理研究
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