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金属表面微纳米光滑构造的新方法
  • ISSN号：1000-6281
  • 期刊名称：《电子显微学报》
  • 时间：0
  • 分类：TB383[一般工业技术—材料科学与工程] TN305[电子电信—物理电子学]
  • 作者机构：[1]北京大学物理学院 介观物理国家重点实验室 电子显微镜实验室,北京100871
  • 相关基金：国家自然科学基金资助项目（Nos.90606023 10574003 20731160012）
作者： 张洋[1], 朱新利[1], 廖志敏[1], 俞大鹏[1]
关键词： 光滑结构, 金属, 电子束曝光, 模板剥离法, sloped metal pattern, electron beam lithography, template-stripping method
中文摘要：

传统的曝光技术等平面工艺通常只能获得边缘陡峭的平面结构。通过多层曝光、灰度曝光、聚焦离子束加工等方法可以实现高度渐变的准三维结构的构造,却往往难以获得良好的光滑度。本文结合电子束曝光技术、PMMA结构平滑技术、模板剥离技术,实现了多种多样的渐变结构的构造。这种技术具有构造方法简单、表面粗糙度小、可自由定位等众多优点。

英文摘要：

Only planar pattern with sharp edges can be fabricated by traditional lithography methods.Quasi-3D structures with gradually changed altitude can be obtained by means of multi-layer lithography,gray-scale photolithography and focused ion beam mining.However,desirable surface smoothness can hardly be achieved.Combining electron beam lithography,PMMA smoothing technique and template stripping method,the fabrication of diverse sloped metal patterns were realized.The method promises easy fabrication of high-quality sloped metal patterns with well-defined pattern positioning.

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期刊信息
  • 《电子显微学报》
  • 中国科技核心期刊
  • 主管单位:中国科学技术协会
  • 主办单位:中国物理学会
  • 主编：张 泽
  • 地址：北京市海淀区中关村北二条13号5号楼301
  • 邮编：100190
  • 邮箱：dzxwxb@blem.ac.cn
  • 电话：010-82671519 62565522/3301
  • 国际标准刊号：ISSN：1000-6281
  • 国内统一刊号：ISSN：11-2295/TN
  • 邮发代号:
  • 获奖情况:
  • 曾获《中国科技论文统计源期刊（中国科技核心期刊）》,《中国科学引文数据库(核心库)》来源期刊,中国自然科学核心期刊（无线电电子学、电信技术类...
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  • 被引量:6569