利用CCD(charge-coupleddevice)对立式接触式干涉仪进行改装研制,变目视观察与判读读数为光电探测、自动瞄准、测量,把显微镜下的干涉条纹图像利用CCD采集后传输到计算机.结合数字图像处理技术,利用波长定度方法实现自动定度,双边直线拟合法自动确定0级干涉条纹中心的准确位置,并根据量块形成的0级干涉条纹中心偏移像素值计算量块长度.实验测试结果表明利用数字图像处理技术消除了人为判读差错的可能性,提高了工作效率,稳定可靠.
The contact type interferometer was reformed using CCD. Then it could transmit the interference fringe picture to computer which always observed by person under the microscope. The measurement system could realize the function that automatically controlled, instrument definition, gauge block measured, data displayed and preservation realized with the image processing technology. The stochastic factor to the measurement result influence was greatly eliminated by the fitting straight line algorithm method was used. Through the above aeries of intellectualizations transformation, the working efficiency of the instrument was greatly enhanced, and the measuring accuracy was increased.