中文摘要：

设计了一种高精度的接触扫描式测头，提出了4种测头弹性结构的设计方案。根据测头的测量范围、测量灵敏性、测量稳定性、各向同性的要求，选择了最优的设计结构。对选择的结构进行了参数设计、力学分析和有限元分析，分析结果表明设计的测头测量范围达到40μm×40μm×20μm，测量刚度小于0．5mN／μm，各向同性也符合设计要求。

英文摘要：

A high precision contact scanning probe is designed and four different elastic mechanism schemes were proposed. According to the requirements of measuring range, sensitive, stability and stiffness equation in every direction, optimal structures were selected. For the selected structure, the parameters design, mechanical analysis and finite element analysis were done. The analysis results show that measuring range can meet the requirement of 40μm×40μm×20μm and measuring stiffness is less than 0. 5 mN/μm, stiffness equation can meet the requirement.