近红外波段的电光调制器是未来光信号处理和计算系统中的关键功能元器件,硅基石墨烯电光调制器在结构尺寸、调制速率、调制带宽及大规模片上集成等方面具有诸多潜在优点而引起人们的广泛关注和重视。本文介绍了石墨烯的光电特性及光调制机理,结合石墨烯在近红外波段电光调制器中的研究及应用,综述了国内外近红外波段硅基石墨烯电光调制器的研究进展,重点叙述了条形波导结构、谐振结构、纳米梁结构的电光调制器的工作原理及各器件的特性,展望了硅基石墨烯电光调制器的研究方向。
Near-infrared (NIR) electro-optic (EO) modulator will play a key role in future optical signal processing and communication systems. Graphene-silicon hybrid EO modulators have attracted much attention due to the merits regarding device footprints, modulation speeds, modulation bandwidth, and mass-productivity. In this paper, we firstly introduce the electro-optical properties of graphene and light modulation mechanism in EO modulators. Then based on the application of the graphene in EO modulators, this paper reviews current research progress of various types of NIR EO modulators based on graphene-silicon hybrid structure, and describes their operation principles and performances, including silicon waveguide graphene-based modulator, silicon micro-ring modulator based on graphene, and EO modulator based on graphene-silicon hybrid 1 D photonic crystal nanobeam cavity. Finally, some future research directions are predicted.