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中文摘要：
大功率垂直腔面发射激光与目前比较成熟的边发射激光相比在光束质量、二维面阵集成、高温工作等方面有很强的优势。2008年以来国内外研究进展迅速,在激光输出功率、效率、波长的多样性以及在应用探索等方面都有长足进步。从垂直腔面发射激光结构特征出发,对其优点特性、国外进展情况,在激光引信等需要窄脉冲工作场合的应用研究情况进行了介绍。中国科学院长春光学精密机械与物理研究所在国内最早开展大功率垂直腔面发射激光研究,单管连续输出功率达到2.5 W,列阵脉冲输出功率超过百瓦。研究中为实现大功率脉冲工作和较好的光束质量,对材料结构设计、微透镜集成和一维线列阵远场叠加等方面开展了研究,对相关结果进行了介绍。
英文摘要：
There are many advantages in the aspects of beam quality,two-dimensional integration,high temperature operation for VCSEL in contrast to the edge emitting diode laser.Great achievements have been realized in the area of high power emission,efficiency,wavelength,and applications since 2008.In this paper,the advantages of VCSEL and the main advances including VCSEL laser fuse were summarized.Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences reported the first VCSEL with an output power in the W regime.Periodic gain structure with InGaAs/GaAsP quantum wells was proposed to obtain high single-pass gain and high power emission.Small p-contact with a contrast of large lateral oxidation aperture was fabricated to improve the current distribution across the active region and the mode characteristics.Single VCSEL with an output power of 2.5 W in CW operation and array in the hundred W in pulsed operation were realized in the last few years.Material structure modification,micro-lens integration and non-uniform linear array were proposed to obtain high power and high beam quality operation.
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