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Investigation of intrinsic gettering for germanium doped Czochralski silicon wafer
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微锗掺杂直拉硅单晶氧和微缺陷的研究
期刊论文 15 会议论文 3 著作 2
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Enhancement effect of germanium on oxygen precipitation in Czochralski silicon
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Germanium effect on oxygen-related defects in Czochralski silicon
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Enhanced oxygen out-diffusion in silicon crystal doped with germanium
Crystal originated particles in germanium-doped Czochralski silicon crystal
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直拉硅单晶中原生氧沉淀的透射电镜研究