位置：成果数据库 > 期刊 > 期刊详情页
Synthesis and structure characterization of low dielectric constant MSQ films by using octamethyl cy
  • ISSN号：0042-207X
  • 期刊名称：Vacuum
  • 时间：2013
  • 页码：59-62
  • 相关项目：双频驱动常压冷等离子体射流的光谱特性研究
作者： Yin, Guiqin|Yuan, Qianghua|Ning, Zhaoyuan|
同期刊论文项目
双频驱动常压冷等离子体射流的光谱特性研究
期刊论文 9
同项目期刊论文
Effect of Oxygen Plasma on Low Dielectric Constant HSQ (Hydrogensilsesquioxane) Films
Optical spectroscopy investigation of Ar/CH3OH and Ar/N2/CH3OH atmospheric pressure plasma jets
Optical Spectroscopic Investigation of Ar/CH3OH and Ar/N-2/CH3OH Atmospheric Pressure Plasma Jets
Deposition of polymer thin film using an atmospheric pressure micro-plasma driven by dual-frequency
Repairing oxygen plasma-damaged on low dielectric constant MSQ (methylsilsesquioxane) films with ann
Nonequilibrium atmospheric pressure plasma jet using a combination of 50 kHz/2MHz dual-frequency pow
Deposition of organosilicone thin film from hexamethyldisiloxane （HMDSO） with 50kHz/ 33MHz dual-frequency atmospheric- pressure plasma jet