位置：成果数据库 > 期刊 > 期刊详情页
E?ect of Low-frequency Power on F, CF2 Relative Density and F/CF2 Ratio in Fluorocarbon Dual-Frequen
  • 期刊名称：Plasma Science and Technology
  • 时间：0
  • 页码：565-570
  • 语言：英文
  • 相关项目：低气压多频等离子体与材料表面相互作用
作者： YE Chao|SHI Guofeng|YUAN Yuan|HUANG Hongwei|NING Zhaoyuan|XU Yijun|
同期刊论文项目
低气压多频等离子体与材料表面相互作用
期刊论文 80 会议论文 8
同项目期刊论文
Surface-charging effect of capacitively coupled plasmas driven by combined dc/rf sources
Effect of C:F Deposition on Etching of SiCOH Low-k Films in CHF3 60 MHz/2 MHz Dual-Frequency Capacit
Structural evolution of silicone oil liquid exposed to Ar plasma
Effect of Krypton Addition on Electron Cyclotron Resonance-Radio Frequency Hybrid Oxygen Plasma for
Investigation of the effect of metastable atoms on mode transition in argon inductive discharge via
Effect of high-frequency on etching of SiCOH films in CHF3 dual-frequency capacitively coupled plasm
Formation of SiC Nanostruture Using Hexamethyldisiloxane During Plasma-Assisted Hot-Filament Chemica
Experimental investigation of ion energy distributions in a dual frequency capacitively coupled Ar/C
Fluid simulation for influence of metastable atoms on the characteristics of capacitively coupled ar
Implicit and electrostatic particle-in-cell/Monte Carlo model in two-dimensional and axisymmetric ge
电子回旋共振-射频双等离子体沉积氧化硅薄膜过程中的射频偏压效应
Effect of bias in patterning diamond by a dual electron cyclotron resonance–radio-frequency oxygen p
Effects of matching network on the hysteresis during E and H mode transitions in argon inductively c
The parameters of electron cyclotron resonance/radio-frequency hybrid hydrogen plasma adjusted by su
射频感应耦合Ar2-N2 等离子体物理特性的 Langmuir 探针测量及理论研究
Frequency Matching Effects on Characteristics of Bulk Plasmas and Sheaths for Dual-Frequency Capacit
热丝辅助双偏压氢等离子体制造金刚石锥状表面研究
13156MHz 低频功率对60MHz 射频 容性耦合等离子体的电特性的影响
Modulating effects of the low-frequency source on ion energy distributions in a dual frequency capac
One-Dimensional Fluid Model for Dust Particles in Dual-Frequency Capacitively Coupled Silane Dischar
Carbon cone arrays by double-bias assisted hot filament plasma chemical vapor deposition
CHF3 Dual-Frequency Capacitively Coupled Plasma by Optical Emission Spectroscopy
60MHz 电容耦合等离子体中电子能量分布函数特性研究
Probe diagnostics and numerical simulations of a low pressure argon slender plasma excited by a low
Spectroscopic study on rotational and vibrational temperature of N2 and N2 + in dual-frequency capac
Cold microplasma plume produced by a compact and flexible generator at atmospheric pressure
Response to “Comment on ‘Influence of exciting frequency on gas and ion rotational temperatures of n
Hysteresis induced by gap length effects in capacitively coupled plasmas at low pressures
Parallelization and optimization of electrostatic Particle-in-Cell/Monte-Carlo Coupled codes as appl
EXPERIMENTAL STUDY OF SPATIAL NON-UNIFORMITIES IN A DUAL FREQUENCY CAPACITIVELY COUPLED PLASMA
Reducing Cu diffusion in SiCOH low-k films by O2 plasma treatment
Fluid simulation of the E-H mode transition in inductively coupled plasma
Numerical results for the Ar and CF4 mixture gas in a dual frequency capacitively coupled plasma usi
Simulation of Dual Frequency Capacitive Sheath over a Concave Electrode in Low Pressure
Dynamic investigation of mode transition in inductively coupled plasma with a hybrid model
Comparison between experiment and simulation for argon inductively coupled plasma
Influence of the low-frequency source parameters on the plasma characteristics in a dual frequency c
Two-Dimensional Simulation of a Dual Frequency Sheath Near an Electrode with a Cylindrical Hole
The influence of Exciting Frequency on N2 and N+2 Vibrational Temperature of Nitrogen Capacitively C
Effect of decamethylcyclopentasiloxane and trifluoromethane electron cyclotron resonance plasmas on
Structural Evolution of SiC Films During Plasma-Assisted Chemical Vapour Deposition
Role of bias frequency in a dual electron cyclotron resonance-radio-frequency hybrid plasma
Numerical investigation of ion energy distribution and ion angle distribution in a dual-frequency ca
Effect of substrate facets on homoepitaxial growth of diamonds during plasma-assisted hot filament c
Buckling instability in amorphous carbon films
SiC Formation Through Interface Reaction between C60 and Si in Plasma Environment
A self-consistent hybrid model of a dual frequency sheath: Ion energy and angular distributions
Two-dimensional fluid model of pulse sheath in plasma immersion ion implantation with dielectric sub
Coupling effect of electron cyclotron resonance hydrogen plasma and dc biasing in fabricating diamon
CHF3双频电容耦合放电等离子体特性研究
双频容性耦合等离子体密度径向均匀性研究
射频感应耦合Ar-N2等离子体物理特性的Langmuir探针测量及理论研究
13.56MHz低频功率对60MHz射频容性耦合等离子体的电特性的影响
60MHz电容耦合等离子体中电子能量分布函数特性研究
热丝助进氢等离子体中电子及活性粒子输运过程的蒙特卡罗模拟
Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model
SiC Formation Through Interface Reaction between C60 and Si in Plasma Environment
C_2F_6、C_4F_8的双频电容耦合等离子体特性研究
CHF_3等离子体刻蚀SiCOH低k薄膜的机理分析
Intermediate Gas Phase of CHa/[Si（CH3）2O]5 Plasma and Its Effect on Structure of SiCOH Film
O_2流量对O_2/C_4F_8等离子体刻蚀SiCOH低k薄膜的影响
Effect of CHF3 Plasma Treatment on the Characteristics of SiCOH Low-k Film
Structural evolution of silicone oil liquid exposed to Ar plasma
Effect of C：F Deposition on Etching of SiCOH Low-k Films in CHF3 60 MHz/2 MHz Dual-Frequency Capacitively Coupled Plasma
Effect of Low-frequency Power on F, CF2 Relative Density and F/CF2 Ratio in Fluorocarbon Dual-Frequency Plasmas
Comparison of 2D Hybrid Simulational and Experimental Results for Dual-Frequency Capacitively Coupled Argon Plasmas
MHD Equilibrium Configuration Reconstructions for HL-2A Tokamak
Improved Double-Probe Technique for Spatially Resolved Diagnosis of Dual-Frequency Capacitive Plasmas