通过器件模拟并结合实验结果,在已有PIN(Positive intrinsic negative)和DPD(Double photo-diodes)探测器电路模型基础之上,对带浅沟槽隔离(STI)准PIN结构的DPD探测器电路模型进行了探讨。模拟了由深N阱和浅沟槽给DPD带来的性能上的改变,同时结合实验结果,从响应电流和探测器的等效串联电阻两方面对电路模型进行了修正,得到了符合该器件的较准确电路模型。
On the basis of PIN (Positive Intrinsic Negative)and DPD (Double Photo-Diodes) detector equivalent circuit models, this paper discusses about the equivalent circuit model of the quasi-PIN structure DPD with shallow trench isolation (STI) by analyzing device simulation and experimental results. After simulating, the improvement performance caused by deep N well and STI is compared with the experimental results. Then the existing model is modified from two aspects-response current and equivalent series resistance. At the end of the paper, more accurate and proper circuit model for the device is got.